Workpiece characterization system
US9383323B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 22, 2011 |
| Grant date | Jul 5, 2016 |
| Priority date | — |
| Expiry date | Feb 5, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/6421
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A workpiece characterization system for obtaining simultaneous measurement of layer and photoluminescence properties of a workpiece. The workpiece characterization system includes an excitation light and an illumination light each impinging upon a surface of a workpiece whereby the workpiece emits photoluminescent light and encodes light from said illumination source with layer information. The excitation light and the illumination light are generated from a single light source. The light from the single light source is filtered to remove wavelengths of light that correlate to light wavelengths emitted from the workpiece as a result of excitation. Wavelengths that correlate to light reflected from the workpiece that may contain encoded information are not filtered.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.