Hammerhead TCP coil support for high RF power conductor etch systems
US9384948B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 21, 2013 |
| Grant date | Jul 5, 2016 |
| Priority date | — |
| Expiry date | Mar 14, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32119
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The chamber, having a ceramic window disposed in a ceiling of the chamber is provided. Included is a ceramic support having a plurality of spokes that extend from a center region to an outer periphery, and each of the spokes include a hammerhead shape that radially expands the ceramic support in a direction that is away from an axis of a spoke. Also included is a plurality of screw holes disposed through the ceramic support. The plurality of screw holes defined to enable screws to connect to a TCP coil having an inner and outer coil. The outer coil is to be disposed under the hammerhead shape of each of the spokes, and a radial gap is defined between each of the hammerhead shapes. The radial gap defines a non-continuous ring around the outer coil. A plurality of screws are disposed through the screw holes for attaching the TCP coil.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.