Method of design-based defect classification and system thereof
US9401013B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2013 |
| Grant date | Jul 26, 2016 |
| Priority date | — |
| Expiry date | Dec 15, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
There is provided an inspection method capable of classifying defects detected on a production layer of a specimen. The method comprises: obtaining input data related to the detected defects; processing the input data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof; and sorting the processed defects in accordance with predefined bins, wherein each bin is associated with at least one classification operation, wherein at least one classification operation sorts at least part of the processed defects to one or more classification bins to yield finally classified defects, and wherein each classification operation, excluding the last one, sorts at least part of the processed defects to be processed by one or more of the following classification operations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.