Method and system for improving characteristic peak signals in analytical electron microscopy
US9406496B2 · kind B2 · utility
1Cited by
5References
23Claims
0Family size
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Key dates
| Filing date | Nov 19, 2012 |
| Grant date | Aug 2, 2016 |
| Priority date | — |
| Expiry date | Nov 19, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2808
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and system are disclosed for improving characteristic peak signals in electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectroscopy (EDS) measurements of crystalline materials. A beam scanning protocol is applied which varies the inclination, azimuthal angle, or a combination thereof of the incident beam while spectroscopic data is acquired. The method and system may be applied to compositional mapping.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.