MEMS device and method of making a MEMS device

US9409763B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Alfons Dehe · Reutlingen, DE
• Martin Wurzer · Munich, DE
• Christian Herzum · Starnberg, DE

Key dates

• Filing date: Apr 4, 2012
• Grant date: Aug 9, 2016
• Expiry date: Jun 13, 2033

Classification

• Technology area (CPC H): Electricity
• CPC primary: H04R19/04
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A MEMS device and a method of making a MEMS device are disclosed. In one embodiment a semiconductor device comprises a substrate, a moveable electrode and a counter electrode, wherein the moveable electrode and the counter electrode are mechanically connected to the substrate. The movable electrode is configured to stiffen an inner region of the movable membrane.