Charged particle beam apparatus and program
US9412557B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 20, 2013 |
| Grant date | Aug 9, 2016 |
| Priority date | — |
| Expiry date | Nov 20, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2801
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The movement distance of a second adjustment slider 204 is made shorter than that of a first adjustment slider 205 if the first adjustment slider 205 is positioned in a displayed range, except at both ends thereof, of a set value adjustment axis 203 in a first set value adjustment axis display part 202. The first adjustment slider 205 is kept unmoved while the second adjustment slider 204 alone is moved in the direction of one of both ends of the displayed range if the first adjustment slider 205 is positioned at least at the one of both ends of the displayed range of the set value adjustment axis 203 in the first set value adjustment axis display part 202, if the second adjustment slider 204 is also positioned in the displayed range except at the both ends thereof, and if the first adjustment slider 205 is to be selectively operated by a cursor 220. This structure allows coarse and fine adjustments of set values for operation control to be carried out easily and accurately.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.