System and method for analyzing voltage breakdown in electrostatic chucks
US9417280B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 29, 2013 |
| Grant date | Aug 16, 2016 |
| Priority date | — |
| Expiry date | Feb 21, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/1227
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system, instructions and a method of determining when an impending failure is likely to occur absent corrective action are disclosed. The system samples the output of a power supply which powers an electrostatic chuck, and determines when that output is outside acceptable limits. The output is sampled at a sufficiently high frequency so as to detect transient anomalies, which are not detectable at lower sampling rates. In some embodiments, the output is converted to a frequency spectrum. The empirical model is compared to known good reference models and, in some embodiments, failure reference models of known failure modes to determine whether an impending failure will occur, and which type of failure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.