Semiconductor device with reduced thickness
US9418922B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 27, 2014 |
| Grant date | Aug 16, 2016 |
| Priority date | — |
| Expiry date | Oct 27, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/181
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor device with reduced thickness is disclosed and may include forming a back end of line (BEOL) comprising a redistribution layer on a dummy substrate. A first semiconductor die may be bonded to a first surface of the BEOL and a second semiconductor die may be bonded to the first semiconductor die. The first and second semiconductor dies may be electrically coupled to the BEOL. The first and second semiconductor dies and the BEOL may be encapsulated utilizing a first encapsulant. The dummy substrate may be removed thereby exposing a second surface of the BEOL opposite to the first surface. A solder ball may be placed on the exposed second surface of the BEOL. The second semiconductor may be stacked stepwise on the first semiconductor and may be flip-chip bonded. The semiconductor dies may be electrically coupled to the BEOL utilizing a lateral plating layer or conductive wires.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.