Patent · US Active

System for measuring the image quality of an optical imaging system

US9429495B2 · kind B2 · utility

0Cited by

50References

22Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Markus Mengel · Heidenheim, DE
Ulrich Wegmann · Oberkochen, DE
Albrecht Ehrmann · Aalen, DE
Wolfgang Emer · Aalen, DE
Reiner Clement · Amstetten, DE
Ludo Mathijssen · Schwäbisch Gmünd, DE

Key dates

Filing date	Aug 11, 2014
Grant date	Aug 30, 2016
Priority date	—
Expiry date	Oct 4, 2034

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/31
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Methods for measuring the image quality of a projection objective include providing a measuring structure on an image-side of the projection objective, providing an immersion fluid between the projection objective and the measuring structure, directing light through the projection objective and the immersion fluid to the measuring structure while shielding the measuring structure from the immersion fluid, detecting light transmitted by the measuring structure, and determining an image quality of the projection objective based on the detected light.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.