Series-connected nanowire structures
US9431388B1 · kind B1 · utility
23Cited by
6References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 29, 2015 |
| Grant date | Aug 30, 2016 |
| Priority date | — |
| Expiry date | Apr 29, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D88/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Series-connected nanowire structures and methods of manufacture are disclosed. The structure includes a plurality of vertically stacked nanowires extending through a gate structure. The structure further includes a plurality of conductively doped contacts connecting to the stacked nanowires in a series configuration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.