Integrated circuit (IC) test structure with monitor chain and test wires
US9435852B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 23, 2015 |
| Grant date | Sep 6, 2016 |
| Priority date | — |
| Expiry date | Sep 23, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Aspects of the present disclosure provide an integrated circuit (IC) test structure. An IC structure according to the present disclosure can include: a monitor chain having a first end electrically connected to a second end through a plurality of metal wires each positioned within one of a first metal level and a second metal level, wherein the first metal level is vertically separated from the second metal level; a first test wire positioned within the first metal level and extending in a first direction, wherein the first test wire is electrically insulated from the monitor chain; and a second test wire positioned within the second metal level and extending in a second direction, wherein the second test wire is electrically insulated from the monitor chain and the first test wire, and wherein the first direction is different from the second direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.