Patent · US Active

Focusing optical systems and methods for testing semiconductors

US9435858B2 · kind B2 · utility

0Cited by

18References

18Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Peter Andrews · Tigard, US
David Hess · Gatineau, CA

Key dates

Filing date	Mar 14, 2011
Grant date	Sep 6, 2016
Priority date	—
Expiry date	Jul 14, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2891
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Focusing optical systems and methods for testing semiconductors are disclosed herein. The methods include receiving an image of a probe through a single optical path of a microscope, substantially focusing the microscope on the probe, and determining a vertical height adjustment between the probe and a device under test based upon the focusing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.