Capacitors including amorphous dielectric layers and methods of forming the same
US9437420B2 · kind B2 · utility
8Cited by
7References
20Claims
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Key dates
| Filing date | Apr 16, 2015 |
| Grant date | Sep 6, 2016 |
| Priority date | — |
| Expiry date | Apr 28, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/68
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A capacitor can include a crystallized metal oxide dielectric layer having a first dielectric constant and an amorphous metal oxide dielectric layer, on the crystallized metal oxide dielectric layer, where the amorphous metal oxide dielectric layer has a second dielectric constant that is less than the first dielectric constant and is greater than a dielectric constant of aluminum oxide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.