Thick pseudomorphic nitride epitaxial layers
US9437430B2 · kind B2 · utility
30Cited by
92References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 25, 2008 |
| Grant date | Sep 6, 2016 |
| Priority date | — |
| Expiry date | Apr 28, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/815
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Semiconductor structures are fabricated to include strained epitaxial layers exceeding a predicted critical thickness thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.