Radiation thermometer using off-focus telecentric optics
US9448119B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 22, 2012 |
| Grant date | Sep 20, 2016 |
| Priority date | — |
| Expiry date | Sep 12, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/0859
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A radiation thermometer utilizing an off-focus telecentric lens arrangement in chemical vapor deposition reactors. An object assembly of one or more optical components is positioned at a distance equal to its focal length from an aperture stop. The aperture stop is dimensioned so that the chief rays are substantially parallel with the optical axis of the object assembly, and so that the rays that pass through the aperture stop define a narrow solid angle about the chief rays. The off-focus telecentric arrangement thus configured is focused at infinity, but is utilized to capture radiation from a relatively proximate target (e.g., within a couple meters) that is out of focus. The capture of collimated radiation from the target diminishes the contribution of stray radiation, particularly with targets having a highly specular surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.