Patent · US Active

Structure and formation method of semiconductor device structure

US9450099B1 · kind B1 · utility

12Cited by
2References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 18, 2015
Grant dateSep 20, 2016
Priority date
Expiry dateJun 18, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/691
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a gate stack over a semiconductor substrate and a protection element over the gate stack. The protection element has an upper portion and a lower portion between the upper portion and the gate stack, and the upper portion is wider than the lower portion. The semiconductor device structure also includes a spacer element over a side surface of the protection element and a sidewall of the gate stack. The semiconductor device structure further includes a conductive contact electrically connected to a conductive feature over the semiconductor substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.