Inventor · Jinshanmian, TW

Chen-Hsiang Lu

24Patents
4h-index
28Co-inventors
55Inventor score

Filing activity: Nov 15, 2013 → Aug 24, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9553090B2 Structure and formation method of semiconductor device structure Electricity 22 Active
US9559205B2 Structure and formation method of semiconductor device structure Electricity 16 Active
US9899271B2 Structure and formation method of semiconductor device structure Electricity 14 Active
US9450099B1 Structure and formation method of semiconductor device structure Electricity 12 Active
US9679850B2 Method of fabricating semiconductor structure Electricity 4 Active
US10686059B2 Structure of semiconductor device structure having fins Electricity 2 Active
US10326005B2 Structure and formation method of semiconductor device structure Electricity 2 Active
US10276469B2 Method for forming semiconductor device structure Electricity 0 Active
US10686060B2 Structure and formation method of semiconductor device structure Electricity 0 Active
US11404250B2 Plasma etcher edge ring with a chamfer geometry and impedance design Electricity 0 Active
US9613816B2 Advanced process control method for controlling width of spacer and dummy sidewall in semiconductor device Electricity 0 Active
US11682716B2 Structure of semiconductor device structure having fins Electricity 0 Active
US10867921B2 Semiconductor structure with tapered conductor Electricity 0 Active
US9842765B2 Semiconductor device structure and method for forming the same Electricity 0 Active
US10304774B2 Semiconductor structure having tapered damascene aperture and method of the same Electricity 0 Active
US9087793B2 Method for etching target layer of semiconductor device in etching apparatus Electricity 0 Active
US9177875B2 Advanced process control method for controlling width of spacer and dummy sidewall in semiconductor device Electricity 0 Active
US9812549B2 Formation method of semiconductor device structure Electricity 0 Active
US12283526B2 Edge fin trim process Electricity 0 Active
US12275832B2 Fluorine-containing elastomer composition and method for making cured fluorine-containing elastomer composition Chemistry; Metallurgy 0 Active
US10014394B2 Structure and formation method of semiconductor device with metal gate Electricity 0 Active
US9892957B2 Semiconductor device structure and method for forming the same Electricity 0 Active
US12049697B2 Multilayer ALD coating for critical components in process chamber Electricity 0 Active
US9704714B2 Method for controlling surface charge on wafer surface in semiconductor fabrication Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.