Inspection of regions of interest using an electron beam system
US9466462B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2014 |
| Grant date | Oct 11, 2016 |
| Priority date | — |
| Expiry date | Jun 1, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A system for scanning a plurality of regions of interest of a substrate using one or more charged particle beams, the system may include: an irradiation module having charged particle optics; a stage for introducing a relative movement between the substrate and the charged particle optics; an imaging module for collecting electrons emanating from the substrate in response to a scanning of the regions of interest by the one or more charged particle beams; and wherein the charged particle optics is arranged to perform countermovements of the charged particle beam during the scanning of the regions of interest thereby countering relative movements introduced between the substrate and the charged particle optics during the scanning of the regions of interest.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.