Detecting open and short of conductors
US9470751B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2014 |
| Grant date | Oct 18, 2016 |
| Priority date | — |
| Expiry date | May 12, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2853
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and a method for evaluating a conductor, the method may include: illuminating a first area of a conductor by a first electron beam thereby charging the first area; illuminating by a second electron beam a second area of the conductor; and wherein an aggregate size of the first and second areas is a fraction of an overall size of the conductor; detecting, by a detector, detected emitted electrons that were emitted substantially from the second area and generating detection signals indicative of the detected emitted electrons; and processing, by a processor, the detection signals to provide information about a conductivity of the conductor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.