Patent · US Active

High-resolution scanning microscopy

US9470883B2 · kind B2 · utility

3Cited by

1References

50Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Thomas Kalkbrenner · Jena, DE
Ingo Kleppe · Jena, DE
Helmut Lippert · Jena, DE
Ralf Netz · Jena, DE

Key dates

Filing date	Sep 19, 2014
Grant date	Oct 18, 2016
Priority date	—
Expiry date	Jan 1, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG02B27/58
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A microscope for high resolution scanning microscopy of a sample, having:an illumination device for the purpose of illuminating the sample, an imaging device for the purpose of scanning at least one point or linear spot over the sample and of imaging the point or linear spot into a diffraction-limited, static single image below am imaging scale in a detection plane. A detector device for detecting the single image in the detection plane for various scan positions, with a spatial resolution which, taking into account the imaging scale in at least one dimension/measurement, is at least twice as high as a full width at half maximum of the diffraction-limited single image. The amplitude and/or phase of a wavefront influenced by the sample is detected with spatial resolution by means for wavefront detection, and wherein the influence of the sample on the phase is determined by means of a wavefront sensor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.