Temperature controlled showerhead
US9476120B2 · kind B2 · utility
13Cited by
36References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2014 |
| Grant date | Oct 25, 2016 |
| Priority date | — |
| Expiry date | Dec 30, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32724
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.