Inventor · Beaverton, OR, US

Easwar Srinivasan

34Patents
15h-index
37Co-inventors
77Inventor score

Filing activity: Mar 11, 2004 → Jul 12, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7265061B1 Method and apparatus for UV exposure of low dielectric constant materials for porogen removal and improved mechanical properties Electricity 573 Expired
US8728956B2 Plasma activated conformal film deposition Electricity 520 Active
US7906174B1 PECVD methods for producing ultra low-k dielectric films using UV treatment Electricity 478 Active
US8592328B2 Method for depositing a chlorine-free conformal sin film Electricity 105 Active
US7253125B1 Method to improve mechanical strength of low-k dielectric film using modulated UV exposure Electricity 68 Expired
US8137467B2 Temperature controlled showerhead Chemistry; Metallurgy 46 Active
US10121689B2 Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing Electricity 41 Active
US9230800B2 Plasma activated conformal film deposition Electricity 40 Active
US7611757B1 Method to improve mechanical strength of low-K dielectric film using modulated UV exposure Electricity 32 Active
US7622400B1 Method for improving mechanical properties of low dielectric constant materials Electricity 32 Expired
US8673080B2 Temperature controlled showerhead Electricity 32 Active
US9070555B2 Method for depositing a chlorine-free conformal sin film Electricity 29 Active
US7695765B1 Methods for producing low-stress carbon-doped oxide films with improved integration properties Electricity 18 Active
US9960068B1 Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing Electricity 16 Active
US8043667B1 Method to improve mechanical strength of low-K dielectric film using modulated UV exposure Electricity 16 Active
US9670579B2 Method for depositing a chlorine-free conformal SiN film Electricity 15 Active
US9476120B2 Temperature controlled showerhead Electricity 13 Active
US9892956B1 Wafer positioning pedestal for semiconductor processing Electricity 12 Active
US8715788B1 Method to improve mechanical strength of low-K dielectric film using modulated UV exposure Electricity 8 Active
US10020220B2 Wafer positioning pedestal for semiconductor processing Electricity 7 Active
US10221484B2 Temperature controlled showerhead Electricity 6 Active
US10699937B2 Wafer positioning pedestal for semiconductor processing Electricity 5 Active
US10354909B2 Wafer positioning pedestal for semiconductor processing Electricity 4 Active
US10870922B2 Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing Electricity 3 Active
US11183400B2 Progressive heating of components of substrate processing systems using TCR element-based heaters Electricity 3 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.