Lithographic apparatus and device manufacturing method
US9477158B2 · kind B2 · utility
0Cited by
40References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 14, 2006 |
| Grant date | Oct 25, 2016 |
| Priority date | — |
| Expiry date | May 14, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70933
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A plurality of extraction conduits are provided to remove immersion liquid into a chamber. The extraction conduits are arranged at different distances from a target portion of the substrate. From the chamber, a passage is provided to which a suction force is applied. When all the conduits are filled with immersion liquid, the extraction capacity will be greater than when one or more of the conduits comprise gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.