Optical measuring device and method for acquiring in situ a stage height between a support and an edge region of an object
US9500471B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 17, 2014 |
| Grant date | Nov 22, 2016 |
| Priority date | — |
| Expiry date | Jun 17, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/0691
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to an optical measuring device for acquiring in situ a difference in distance between a support and an edge region of an object to be measured. The optical measuring device has a measuring head with dual beam guide which directs a first measuring beam towards the support and a second measuring beam towards the edge region of the object to be measured. Means are provided for acquiring and forming reflection spectra of the first measuring beam which is directed towards the support and the second measuring beam which is directed towards the edge region of the object to be measured. The measuring device has a multi-channel measuring apparatus with one spectrometer line. An evaluation unit for the reflection spectra for acquiring the stage height between the support and the edge region of the object works together with a spectrometer and a display unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.