Patent · US Active

High voltage chuck for a probe station

US9506973B2 · kind B2 · utility

3Cited by

20References

12Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Michael E. Simmons · Colton, US
Kazuki Negishi · Hillsboro, US
Roy Jensen · Pleasant Prairie, US
Ryan Garrison · Beaverton, US
Philip Wolf · Beaverton, US

Key dates

Filing date	Apr 11, 2011
Grant date	Nov 29, 2016
Priority date	—
Expiry date	Nov 30, 2032

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T279/34
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A chuck for testing an integrated circuit includes an upper conductive layer having a lower surface and an upper surface suitable to support a device under test. An upper insulating layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper conductive layer, and a lower surface. A middle conductive layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper insulating layer, and a lower surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.