Patent · US Active

In-situ removable electrostatic chuck

US9508584B2 · kind B2 · utility

4Cited by

6References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Michael S. Cox · Gilroy, US
Lara Hawrylchak · Gilroy, US
Steven V. Sansoni · Livermore, US

Key dates

Filing date	Aug 4, 2014
Grant date	Nov 29, 2016
Priority date	—
Expiry date	Feb 20, 2035

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49815
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Embodiments described herein generally relate to an electrostatic chuck (ESC). The ESC may contain a first plurality of electrodes adapted to electrostatically couple a substrate to the ESC and a second plurality of electrodes adapted to electrostatically couple the ESC to a substrate support. Instead of being integrally disposed within the substrate support, the ESC may be easily removed from the substrate support and removed from a chamber for maintenance or replacement purposes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.