TEM sample mounting geometry
US9514913B2 · kind B2 · utility
0Cited by
8References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 17, 2015 |
| Grant date | Dec 6, 2016 |
| Priority date | — |
| Expiry date | Jul 17, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/226
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A system and method for transmission electron microscopy is provided. The sample can be examined from multiple directions using an electron beam in a transmission electron microscope. The sample has at least three observation faces that are not parallel to each other with the thickness of the sample orthogonal to each of the observation faces being less than 200 nm. The sample is mounted on a needle that is needle rotatable about more than one axis so the needle can orient at least three of the observation faces to be normal to the electron beam of the electron microscope for observation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.