Polishing apparatus
US9522453B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2015 |
| Grant date | Dec 20, 2016 |
| Priority date | — |
| Expiry date | Jul 6, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/107
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A polishing apparatus which can continue stable operation of the apparatus without generating torsional vibration in a rotary joint and without generating an abnormal sound at an engagement part between a cooling water pipe and a polishing table is disclosed. The polishing apparatus includes a rotary joint fixed to a rotating part of the polishing table or a rotating part of the top ring to supply a fluid into the polishing table or the top ring and discharge the fluid from the polishing table or the top ring, and a rotation-prevention mechanism which connects the rotary joint with an apparatus frame to prevent the rotary joint from being rotated. The rotation-prevention mechanism includes a link mechanism having at least one spherical plain bearing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.