Ion implantation machine presenting increased productivity
US9524853B2 · kind B2 · utility
1Cited by
3References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 9, 2014 |
| Grant date | Dec 20, 2016 |
| Priority date | — |
| Expiry date | Apr 9, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32715
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention relates to an ion implantation machine 100 that comprises: The machine is remarkable in that:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.