Methods of detecting inhomogeneity of a layer and apparatus for performing the same
US9528949B2 · kind B2 · utility
1Cited by
8References
17Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 5, 2014 |
| Grant date | Dec 27, 2016 |
| Priority date | — |
| Expiry date | Dec 6, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/611
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a method of detecting inhomogeneity of a layer, an incident light may be irradiated to at least two regions of the layer at a first incident angle position. First reflected lights reflected from the two regions of the layer may be sensed. The incident light may be irradiated to the at least two regions of the layer at a second incident angle position. Second reflected lights reflected from the two regions of the layer may be sensed. The first reflected lights and the second reflected lights may be compared with each other to obtain the inhomogeneity of the layer. Thus, the layer having a spot may be found.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.