Inventor · Seojong-myeon, KR

Pil-Kwon Jun

29Patents
7h-index
60Co-inventors
68Inventor score

Filing activity: Dec 20, 1996 → May 27, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US5866305A Thinner composition for washing a photoresist in a process for preparing semiconductors Physics 15 Expired
US6100203A Methods of employing aqueous cleaning compositions in manufacturing microelectronic devices Electricity 11 Expired
US7951653B1 Methods of manufacturing a semiconductor device using compositions for etching copper Electricity 9 Active
US6883248B2 Apparatus for drying a substrate using an isopropyl alcohol vapor Electricity 9 Expired
US7311857B2 Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device Chemistry; Metallurgy 8 Expired
US6959823B2 Wafer guides for processing semiconductor substrates Emerging Cross-Sectional Technologies 8 Expired
US6432622B1 Photoresist stripper composition and method for stripping photoresist using the same Chemistry; Metallurgy 8 Expired
US6655042B2 System and method for drying semiconductor substrate Electricity 6 Expired
US6458518B1 Photoresist stripper composition and method for stripping photoresist using the same Chemistry; Metallurgy 6 Expired
US6207358A Method of stripping a photoresist from a semiconductor substrate using dimethylacetamide or a combination of monoethanolamine and dimethylsulfoxide Physics 4 Expired
US7183192B2 Composition for removing photoresist and method of forming a bump electrode in a semiconductor device using the composition Electricity 3 Expired
US7100306B2 Wafer guides for processing semiconductor substrates Emerging Cross-Sectional Technologies 3 Expired
US8455359B2 Semiconductor devices and methods of manufacturing the same Electricity 3 Active
US6337174B1 Method of stripping a photoresist from a semiconductor substrate dimethylacetamide or a combination of monoethanolamine and dimethylsulfoxide Physics 2 Expired
US7985297B2 Method of cleaning a quartz part Chemistry; Metallurgy 2 Active
US6713440B2 Resist and etching by-product removing composition and resist removing method using the same Chemistry; Metallurgy 2 Expired
US7037852B2 Composition for stripping photoresist and method of preparing the same Electricity 1 Expired
US6905570B2 Apparatus for manufacturing integrated circuit device Electricity 1 Expired
US7879736B2 Composition for etching silicon oxide and method of forming a contact hole using the same Electricity 1 Active
US7811836B2 Methods of manufacturing reference sample substrates for analyzing metal contamination levels Emerging Cross-Sectional Technologies 1 Active
US9528949B2 Methods of detecting inhomogeneity of a layer and apparatus for performing the same Physics 1 Active
US9638609B2 Apparatus for providing sample gas and related methods Emerging Cross-Sectional Technologies 0 Active
US7678751B2 Composition for removing photoresist, method of removing photoresist and method of manufacturing a semiconductor device using the same Chemistry; Metallurgy 0 Active
US7223721B2 Resist and etching by-product removing composition and resist removing method using the same Chemistry; Metallurgy 0 Expired
US7608540B2 Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.