Patent · US Active

Operating method of memory device

US9530511B1 · kind B1 · utility

0Cited by
6References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 15, 2015
Grant dateDec 27, 2016
Priority date
Expiry dateDec 15, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/693
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

An operating method of a memory device includes providing the memory device and performing an erase operation. The memory device includes a substrate, a gate dielectric layer formed on the substrate, a gate conductive layer formed on the gate dielectric layer, a charge trapping layer, a charge blocking layer, a source region, and a drain region. The charge trapping layer has a vertical portion formed on a sidewall of the gate conductive layer and a horizontal portion formed between the substrate and the gate conductive layer. The charge blocking layer is formed between the substrate and the charge trapping layer. The source and drain regions are formed in the substrate and located at two sides of the gate conductive layer respectively. Performing the erase operation includes applying an erase voltage to the gate conductive layer for inducing a BBHH injection and a FN hole tunneling.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.