System and method for calibrating charge-regulating module
US9536697B2 · kind B2 · utility
4Cited by
4References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 19, 2015 |
| Grant date | Jan 3, 2017 |
| Priority date | — |
| Expiry date | May 19, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/024
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This invention provides a system and a method for calibrating charge-regulation module in vacuum environment. Means for mounting the charge-regulation module provides motions to the charge-regulation module such that a beam spot, illuminated by the charge-regulation module, on a sample surface can be moved to a pre-determined position which is irradiated by a charged particle beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.