Patent · US Active

System and method for a MEMS transducer

US9540226B2 · kind B2 · utility

6Cited by

4References

36Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Wolfgang Klein · Zorneding, DE
Martin Wurzer · Munich, DE
Stefan Barzen · Munich, DE
Alfons Dehe · Reutlingen, DE

Key dates

Filing date	May 20, 2015
Grant date	Jan 10, 2017
Priority date	—
Expiry date	May 20, 2035

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2201/003
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

According to an embodiment, a microelectromechanical systems (MEMS) transducer includes a first electrode, a second electrode fixed to an anchor at a perimeter of the second electrode, and a mechanical support separate from the anchor at the perimeter of the second electrode and mechanically connected to the first electrode and the second electrode. The mechanical support is fixed to a portion of the second electrode such that, during operation, a maximum deflection of the second electrode occurs between the mechanical structure and the perimeter of the second electrode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.