Patent · US Active

Electron microscope

US9543115B2 · kind B2 · utility

1Cited by

2References

20Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Gerd Benner · Aalen, DE
Marko Matijevic · Ljubljana, SI

Key dates

Filing date	Nov 25, 2014
Grant date	Jan 10, 2017
Priority date	—
Expiry date	Jul 31, 2035

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/244
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An electron microscope includes an electron beam source, a first electromagnet, a second electromagnet and a detector. The field generated by the first electromagnet has an effect of three lenses subsequently arranged along the beam path. A first lens of these lenses is arranged upstream of the object plane and focuses the beam at the object plane. The second lens of these three lenses is arranged downstream of the object plane. The third lens of these three lenses generates an image of a diffraction plane of the second lens at the detector. The magnetic field generated by the second electromagnet has an effect of a fourth lens and can be changed in order to change a size of the image of the diffraction plane of the second lens on the detector.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.