Method of producing an un-distorted dark field strain map at high spatial resolution through dark field electron holography
US9551674B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2015 |
| Grant date | Jan 24, 2017 |
| Priority date | — |
| Expiry date | Oct 30, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/607
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inline dark field holographic method for measuring strain in a semiconductor or other crystalline material using a transmission electron microscope having an electron gun for passing an electron beam through strained and unstrained specimens. A condenser mini-lens between the magnetic tilting coil and the specimens increases defection of the beam at an angle with prior to passing through the pair of specimens. The first objective lens forms a virtual image of each of the specimens and the second objective lens focuses the virtual images of each of the specimens at an intermediate image plane to form intermediate images of each of the specimens. The biprism creates the interference pattern between the specimens is formed at the image plane, which may then be viewed to determine the degree of strain of the strained specimen and provides a coma-free strain map with minimal optical distortion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.