System for and method of monitoring flow through mass flow controllers in real time
US9557744B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 11, 2014 |
| Grant date | Jan 31, 2017 |
| Priority date | — |
| Expiry date | Jan 4, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/776
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mass flow controller comprises: a first flow meter constructed and arranged to measured flow rate of mass through the mass flow controller; a second flow meter constructed and arranged to measure flow rate of mass through the mass flow controller; a control valve constructed and arranged so as to control the flow rate of mass through the mass flow controller in response to a control signal generated as a function of the flow rate as measured by one of the flow meters; and a system controller constructed and arranged to generate the control signal, and to provide an indication when a difference between the flow rate of mass as measured by the first flow meter and the flow rate of mass as measured by the second flow meter exceeds a threshold.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.