Method for manufacturing a TEM-lamella and assembly having a TEM-lamella protective structure
US9570269B2 · kind B2 · utility
1Cited by
3References
26Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 22, 2014 |
| Grant date | Feb 14, 2017 |
| Priority date | — |
| Expiry date | Aug 19, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1052
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for manufacturing a TEM-lamella is disclosed. The method includes: disposing a self-supporting protective structure on a surface of a substrate; bonding the protective structure to the substrate; cutting out a lamella from the substrate using a particle beam so that the lamella remains bonded to at least a portion of the protective structure; fastening a first tool to the lamella; and moving away the lamella from a residual portion of the substrate by moving the first tool relative to the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.