Patent · US Active

Force measurement with real-time baseline determination

US9575090B2 · kind B2 · utility

3Cited by

0References

9Claims

0Family size

Assignee

Bruker Nano, Inc. · US

Inventors

Changchun Liu · Sunnyvale, US
Bede Pittenger · Lompoc, US
Shuiqing Hu · Lompoc, US
Chanmin Su · Ventura, US

Key dates

Filing date	Dec 8, 2014
Grant date	Feb 21, 2017
Priority date	—
Expiry date	Jan 21, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG01Q30/06
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An atomic force microscope (AFM) and corresponding method to provide low force (sub-20 pN) AFM control and mechanical property measurement is provided. The preferred embodiments employ real-time false deflection correction/discrimination by adaptively modifying the drive ramp to accommodate to deflection artifacts.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.