Slit valve with a pressurized gas bearing
US9587749B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 11, 2014 |
| Grant date | Mar 7, 2017 |
| Priority date | — |
| Expiry date | Nov 15, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/877
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
There is provided a slit valve, comprising: a first slit valve portion having a first window therethrough, the first window is sized to permit passage of an object through the first window; wherein the first window is surrounded by a first area of the first slit valve portion; a second slit valve portion that comprises a first sealing element and a first positioning module; wherein the first positioning module is arranged to move the first sealing element in relation to the first window; wherein at least one slit valve portion of the first and second slit valve portions comprises at least one first gas opening for emitting pressurized gas so as to assist in a creation of a first gas cushion between the first area and the first sealing element when the first sealing element is placed adjacent to the first window thus creating a seal between the first and second slit valve portions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.