Patent · US Active

Growing graphene on substrates

US9595436B2 · kind B2 · utility

3Cited by

3References

19Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Cara Beasley · Scotts Valley, US
Ralf Hofmann · Heidenheim, DE
Majeed A. Foad · Sunnyvale, US

Key dates

Filing date	Oct 24, 2013
Grant date	Mar 14, 2017
Priority date	—
Expiry date	Oct 24, 2033

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB05D5/12
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Embodiments described herein provide methods and apparatus for forming graphitic carbon such as graphene on a substrate. The method includes providing a precursor comprising a linear conjugated hydrocarbon, depositing a hydrocarbon layer from the precursor on the substrate, and forming graphene from the hydrocarbon layer by applying energy to the substrate. The precursor may include template molecules such as polynuclear aromatics, and may be deposited on the substrate by spinning on, by spraying, by flowing, by dipping, or by condensing. The energy may be applied as radiant energy, thermal energy, or plasma energy.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.