Ralf Hofmann
46Patents
10h-index
77Co-inventors
78Inventor score
Filing activity: Apr 22, 1991 → Dec 7, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7269664B2 | Network portal system and methods | Emerging Cross-Sectional Technologies | 286 | Expired |
| US5902461A | Apparatus and method for enhancing uniformity of a metal film formed on a substrate with the aid of an inductively coupled plasma | Electricity | 65 | Expired |
| US5763851A | Slotted RF coil shield for plasma deposition system | Emerging Cross-Sectional Technologies | 59 | Expired |
| US5181257A | Method and apparatus for determining register differences from a multi-color printed image | Physics | 58 | Expired |
| US6132566A | Apparatus and method for sputtering ionized material in a plasma | Emerging Cross-Sectional Technologies | 57 | Expired |
| US7281060B2 | Computer-based presentation manager and method for individual user-device data representation | Electricity | 42 | Expired |
| US9612522B2 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Physics | 35 | Active |
| US7244344B2 | Physical vapor deposition plasma reactor with VHF source power applied through the workpiece | Electricity | 21 | Expired |
| US9325007B2 | Shadow mask alignment and management system | Emerging Cross-Sectional Technologies | 12 | Active |
| US5876574A | Magnet design for a sputtering chamber | Electricity | 12 | Expired |
| US6146508A | Sputtering method and apparatus with small diameter RF coil | Electricity | 10 | Expired |
| USD664043S1 | Packaging container for bottles | General | 9 | Active |
| US9417515B2 | Ultra-smooth layer ultraviolet lithography mirrors and blanks, and manufacturing and lithography systems therefor | Physics | 7 | Active |
| US9739913B2 | Extreme ultraviolet capping layer and method of manufacturing and lithography thereof | Physics | 6 | Active |
| US9096927B2 | Cooling ring for physical vapor deposition chamber target | Electricity | 5 | Active |
| US9018110B2 | Apparatus and methods for microwave processing of semiconductor substrates | Electricity | 5 | Active |
| US8782206B2 | Load-balanced allocation of medical task flows to servers of a server farm | Physics | 4 | Active |
| US9354508B2 | Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor | Physics | 4 | Active |
| US9595436B2 | Growing graphene on substrates | Performing Operations; Transporting | 3 | Active |
| US9581890B2 | Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof | Electricity | 3 | Active |
| US9870935B2 | Monitoring system for deposition and method of operation thereof | Electricity | 3 | Active |
| US7820020B2 | Apparatus for plasma-enhanced physical vapor deposition of copper with RF source power applied through the workpiece with a lighter-than-copper carrier gas | Electricity | 3 | Active |
| US6409890B1 | Method and apparatus for forming a uniform layer on a workpiece during sputtering | Electricity | 3 | Expired |
| US9748125B2 | Continuous substrate processing system | Electricity | 3 | Active |
| US9343347B2 | Portable electrostatic chuck carrier for thin substrates | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.