Inventor · Heidenheim, DE

Ralf Hofmann

46Patents
10h-index
77Co-inventors
78Inventor score

Filing activity: Apr 22, 1991 → Dec 7, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US7269664B2 Network portal system and methods Emerging Cross-Sectional Technologies 286 Expired
US5902461A Apparatus and method for enhancing uniformity of a metal film formed on a substrate with the aid of an inductively coupled plasma Electricity 65 Expired
US5763851A Slotted RF coil shield for plasma deposition system Emerging Cross-Sectional Technologies 59 Expired
US5181257A Method and apparatus for determining register differences from a multi-color printed image Physics 58 Expired
US6132566A Apparatus and method for sputtering ionized material in a plasma Emerging Cross-Sectional Technologies 57 Expired
US7281060B2 Computer-based presentation manager and method for individual user-device data representation Electricity 42 Expired
US9612522B2 Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor Physics 35 Active
US7244344B2 Physical vapor deposition plasma reactor with VHF source power applied through the workpiece Electricity 21 Expired
US9325007B2 Shadow mask alignment and management system Emerging Cross-Sectional Technologies 12 Active
US5876574A Magnet design for a sputtering chamber Electricity 12 Expired
US6146508A Sputtering method and apparatus with small diameter RF coil Electricity 10 Expired
USD664043S1 Packaging container for bottles General 9 Active
US9417515B2 Ultra-smooth layer ultraviolet lithography mirrors and blanks, and manufacturing and lithography systems therefor Physics 7 Active
US9739913B2 Extreme ultraviolet capping layer and method of manufacturing and lithography thereof Physics 6 Active
US9096927B2 Cooling ring for physical vapor deposition chamber target Electricity 5 Active
US9018110B2 Apparatus and methods for microwave processing of semiconductor substrates Electricity 5 Active
US8782206B2 Load-balanced allocation of medical task flows to servers of a server farm Physics 4 Active
US9354508B2 Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor Physics 4 Active
US9595436B2 Growing graphene on substrates Performing Operations; Transporting 3 Active
US9581890B2 Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof Electricity 3 Active
US9870935B2 Monitoring system for deposition and method of operation thereof Electricity 3 Active
US7820020B2 Apparatus for plasma-enhanced physical vapor deposition of copper with RF source power applied through the workpiece with a lighter-than-copper carrier gas Electricity 3 Active
US6409890B1 Method and apparatus for forming a uniform layer on a workpiece during sputtering Electricity 3 Expired
US9748125B2 Continuous substrate processing system Electricity 3 Active
US9343347B2 Portable electrostatic chuck carrier for thin substrates Electricity 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.