Patent · US Active

Micromechanical sensor device

US9606141B2 · kind B2 · utility

0Cited by

5References

11Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Jens Frey · Echterdingen, DE
Arnd Kaelberer · Neckargemünd, DE
Jochen Reinmuth · Reutlingen, DE
Johannes Classen · Reutlingen, DE

Key dates

Filing date	Nov 6, 2014
Grant date	Mar 28, 2017
Priority date	—
Expiry date	Apr 20, 2035

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49002
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical sensor device, having a first unhoused sensor unit, and at least one second unhoused sensor unit, the sensor units being functionally connected to one another, the sensor units being essentially vertically configured one over the other so that a sensor unit having a larger footprint completely covers a sensor unit having a smaller footprint.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.