Lithographic apparatus and device manufacturing method
US9606448B2 · kind B2 · utility
1Cited by
39References
39Claims
0Family size
Assignee
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Key dates
| Filing date | May 28, 2013 |
| Grant date | Mar 28, 2017 |
| Priority date | — |
| Expiry date | Apr 24, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/162
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A lithographic projection apparatus is disclosed for use with an immersion liquid positioned between the projection system and a substrate. Several methods and mechanism are disclosed to protect components of the projection system, substrate table and a liquid confinement system. These include providing a protective coating on a final element of the projection system as well as providing one or more sacrificial bodies upstream of the components. A two component final optical element of CaF2 is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.