Method of performing tomographic imaging of a sample in a charged-particle microscope
US9618460B2 · kind B2 · utility
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4References
20Claims
0Family size
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Key dates
| Filing date | Sep 9, 2013 |
| Grant date | Apr 11, 2017 |
| Priority date | — |
| Expiry date | Sep 9, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2807
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a method of performing tomographic imaging involving repeatedly directing a charged particle beam through a sample for a series of sample tilts to acquire a corresponding set of images and mathematically combining the images to construct a composite image. The latter of which consists of, at each of a second series of sample tilts, using a spectral detector to accrue a spectral map of said sample, thus acquiring a collection of spectral maps; analyzing said spectral maps to derive compositional data of the sample; and employing said compositional data in constructing said composite image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.