Carbon nanotube device
US9640765B2 · kind B2 · utility
0Cited by
18References
8Claims
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Key dates
| Filing date | Jun 23, 2016 |
| Grant date | May 2, 2017 |
| Priority date | — |
| Expiry date | Jun 23, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/842
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Embodiments of the present invention provide a method of forming carbon nanotube based semiconductor devices. The method includes creating a guiding structure in a substrate for forming a device; dispersing a plurality of carbon nanotubes inside the guiding structure, the plurality of carbon nanotubes having an orientation determined by the guiding structure; fixating the plurality of carbon nanotubes to the guiding structure; and forming one or more contacts to the device. Structure of the formed carbon nanotube device is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.