Patent · US Active

Detecting arcing using processing chamber data

US9653269B2 · kind B2 · utility

0Cited by

2References

23Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Shuo Na · Sunnyvale, US
Kelby Yancy · Forney, US
Chunsheng Chen · Tianjin, CN
Ilias Iliopoulos · Paris, FR

Key dates

Filing date	Aug 13, 2014
Grant date	May 16, 2017
Priority date	—
Expiry date	Apr 10, 2035

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/24592
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method and apparatus for detecting substrate arcing and breakage within a processing chamber is provided. A controller monitors chamber data, e.g., parameters such as RF signals, voltages, and other electrical parameters, during operation of the processing chamber, and analyzes the chamber data for abnormal spikes and trends. Using such data mining and analysis, the controller can detect broken substrates without relying on glass presence sensors on robots, but rather based on the chamber data.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.