Rotary EUV collector
US9665007B2 · kind B2 · utility
1Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 29, 2016 |
| Grant date | May 30, 2017 |
| Priority date | — |
| Expiry date | Aug 29, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K1/067
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An EUV collector is rotated between or during operations of an EUV photolithography system. Rotating the EUV collector causes contamination to distribute more evenly over the collector's surface. This reduces the rate at which the EUV photolithography system loses image fidelity with increasing contamination and thereby increases the collector lifetime. Rotating the collector during operation of the EUV photolithography system can induce convection and reduce the contamination rate. By rotating the collector at sufficient speed, some contaminating debris can be removed through the action of centrifugal force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.