Inventor · Hsinchu, TW

Jui-Ching Wu

16Patents
3h-index
28Co-inventors
52Inventor score

Filing activity: Sep 22, 2011 → Oct 28, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US9140987B2 Method for lithography patterning Electricity 6 Active
US8563231B2 Patterning process and materials for lithography Physics 4 Active
US10459353B2 Lithography system with an embedded cleaning module Physics 4 Active
US9229326B2 Method for integrated circuit patterning Electricity 3 Active
US10559171B2 Electronic system sharing power with doorbell and power-supply method thereof Electricity 2 Active
US10067418B2 Particle removal system and method thereof Performing Operations; Transporting 2 Active
US9665007B2 Rotary EUV collector Physics 1 Active
US9046776B2 System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle Physics 1 Active
US9429858B2 Rotary EUV collector Physics 1 Active
US9558944B2 System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle Physics 1 Active
US9412632B2 Reticle pod Electricity 1 Active
US10274838B2 System and method for performing lithography process in semiconductor device fabrication Physics 0 Active
US10976672B2 System and method for performing lithography process in semiconductor device fabrication Physics 0 Active
US10685846B2 Semiconductor integrated circuit fabrication with pattern-reversing process Electricity 0 Active
US9159559B2 Lithography layer with quenchers to prevent pattern collapse Electricity 0 Active
US11378894B2 Lithography system with an embedded cleaning module Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.