Fuel stream generator, source collector apparatus and lithographic apparatus
US9671698B2 · kind B2 · utility
1Cited by
5References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2013 |
| Grant date | Jun 6, 2017 |
| Priority date | — |
| Expiry date | Oct 15, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/218
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A fuel stream generator comprising a nozzle connected to a fuel reservoir, wherein the nozzle is provided with a gas inlet configured to provide a sheath of gas around fuel flowing along the nozzle is disclosed. Also disclosed are a method of generating fuel droplets and a lithography apparatus incorporating the fuel stream generator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.